Remarks:
Vacuum Chamber, Aluminum, Rectangle, 6”*6”*4”
Electrode Configuration, Silngle 5”*5” Horizontal
RF Generator & Matching Network 125W, 50KHz
1~2 Gas channels W/Precision Needle Valve Flow Control, 0~25 CC/min
Vacuum Gauge, 0~1Torr
Vacuum Pump, 5 CFM, Oxyger Service
Process Sequence, Single
AC Input 120V, 50Hz, 15A